MEMS Accelerometers: Open Loop and Closed Loop Sensors for Inertial Sensing and Navigation

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Physical Logic is an expert developer and manufacturer of MEMS accelerometers for inertial sensing and navigation.

MAXL-CL-3030 Closed Loop MEMS Accelerometer

Our low C-SWaP (cost, size, weight and power) open and closed loop sensors are ideal for a wide range of various aerospace, land and maritime systems for defense and industrial applications, such as UAVs (unmanned aerial vehicles) UGVs (unmanned ground vehicles) and other robotic platforms.

Physical Logic’s MEMS accelerometers are manufactured at a state-of-the-art in-house production facility, featuring fully-qualified high-capacity assembly and test lines.

By subcontracting the MEMS manufacturing, the Company supports its highly competitive cost structure and operational flexibility. Furthermore, it allows the Company to keep a flexible and cost-effective supply chain. All Physical Logic manufacturing processes are fully AS9100D and ISO9001-2015 compliant.

MEMS Accelerometers:

MAXL-CL-3030 MEMS Closed Loop Accelerometer MAXL-OL-2040 MEMS Open Loop Accelerometer MAXL-OL-2002C MEMS Open Loop Accelerometer
Closed Loop Open Loop Export Control-Free
MAXL-CL-3000 Family MAXL-OL-2000 Family MAXL-OL-2000C Family
Input Range From ±15 g up-to ±70 g From ±2 g up-to ±70 g From ±2 g up-to ±40 g

Physical Logic MEMS Sensor Technology

Advanced low-noise accelerometers for unmanned systems

Physical Logic advanced accelerometers are based on micro-machined silicon MEMS devices, combined with a custom low-power ASIC. The MEMS device features a unique in-plane geometry that enables high reliability, excellent linearity, and extremely low thermo-mechanical noise levels.

The MEMS and ASIC chips are fabricated separately, and integrated into a highly-compact ceramic package, hermetically-sealed at atmospheric pressure. Featuring excellent long-term stability, our low-noise electronic sensors offer clear performance advantages over other inertial and tactical grade MEMS units.

Physical Logic MEMS Accelerometer

Our Closed Loop accelerometers are produced using the same proven process flow as our Open Loop devices, with the addition of an actuator that is mechanically and electrically isolated from the sensing element. The advanced, custom-designed mixed-signal system on chip (SOC) ASIC provides advanced functions including analogue-to-digital conversion (ADC), sigma-delta modulation and phase compensation.

Learn more about our MEMS Sensor Technology >

Inertial Navigation for UAVs and Unmanned Systems

Capacitive accelerometers with MEMS sensor technology

Our MEMS capacitive accelerometers are ideal for developing tactical and inertial navigation grade inertial measurement units (IMUs) for drones, autonomous vehicles, and robotics, providing high-accuracy acceleration and orientation data that can be used to calculate vehicle position and velocity.

Our sensors can be combined with gyroscopes and magnetometers to provide precise real-time inertial sensing capabilities for navigation, stability and control applications in a wide range of unmanned systems.

Integrated into a compact specially-designed ceramic package, our high precision electronic sensors provide a competitive alternative to traditional electromechanical accelerometers and feature superior C-SWaP characteristics. Our product line includes the only inertial navigation grade MEMS Closed Loop accelerometer currently available on the market.

Closed Loop Sensors

MAXL-CL-3000 Inertial Navigation Grade Accelerometer Family

MAXL-CL-3030 Closed Loop MEMS AccelerometerThe MAXL-CL-3000 is a family of advanced high-performance MEMS Closed Loop electronic sensors for tactical and inertial navigation applications, incorporating a unique MEMS device and custom ASIC and providing a digital acceleration output.

With a low C-SWaP footprint in a hermetically-sealed LCC44 package, and current consumption of less than 50 mA, these high-grade sensors enable high volume production with excellent reliability and reduced cost. They are ideal for incorporation into IMUs and inertial sensing systems that can compete with other market-leading devices.

The MAXL-CL-3000 series is offered from ±15g up to ±70g sensing ranges. MAXL-CL-3000 grades 10 and 15 are MTCR free, with one year bias repeatability of less than 4mg and 2mg, respectively. Our tactical and navigational grade MAXL-CL-3000 grade 20 and 30, offer one year bias repeatability of less than 1.2mg and 0.5mg respectively.

Open Loop Sensors

MAXL-OL-2000 MEMS Accelerometer Series

MAXL-OL-2002 MEMS AccelerometerThe MAXL-OL-2000 is a family of advanced Open Loop MEMS accelerometers available in a variety of sensing ranges. These high-performance sensors are ideal for inertial navigation and vibration sensing applications requiring superior measurement accuracy.

SWaP-optimized, our MAXL-OL-2000 devices are lightweight, with a low-footprint and a current consumption of less than 13 mA. The sensors are enclosed in a hermetically-sealed LCC20 ceramic package.

Specifications:

MAXL-OL-2002 MAXL-OL-2005 MAXL-OL-2010 MAXL-OL-2015 MAXL-OL-2020 MAXL-OL-2040 MAXL-OL-2070
Input Range ±2 g ±5 g ±10 g ±15 g ±20 g ±40 g ±70 g
Bandwidth (-3dB) 200 Hz 250 Hz 250 Hz 250 Hz 250 Hz 300 Hz 300 Hz
Noise Density 1.2 µg/√Hz 1.6 µg/√Hz 2.2 µg/√Hz 4 µg/√Hz 4 µg/√Hz 5 µg/√Hz 5 µg/√Hz
SF Long-Term Repeatability 600 ppm 600 ppm 600 ppm 600 ppm 600 ppm 600 ppm 600 ppm
Bias Long-Term Repeatability 0.5 mg 0.8 mg 1.5 mg 2 mg 2 mg 4 mg 5 mg

Export Control-Free Open Loop Accelerometers

A family of export control-free MAXL-OL-2000C Open Loop sensors is also available, designed to provide high stability and low noise measurement.
The export control free series is offered for sensing ranges from ±2g up to ±40g, with the same design and manufacturing process, differentiated from the export controlled series (MAXL-OL-2000) by final testing procedure.

MAXL-OL-2002C Open Loop MEMS Accelerometer

MAXL-OL-2005C Open Loop MEMS Accelerometer

MAXL-OL-2010C Open Loop MEMS Accelerometer

Specifications:

MAXL-OL-2002C MAXL-OL-2005C MAXL-OL-2010C MAXL-OL-2015C MAXL-OL-2020C MAXL-OL-2040C
Input Range ±2 g ±5 g ±10 g ±15 g ±20 g ±40 g
Bandwidth (-3dB) 200 Hz 250 Hz 250 Hz 250 Hz 250 Hz 300 Hz
Noise Density 1.2 µg/√Hz 1.6 µg/√Hz 2.2 µg/√Hz 4 µg/√Hz 4 µg/√Hz 5 µg/√Hz
SF Long-Term Repeatability 600 ppm 600 ppm 600 ppm 600 ppm 600 ppm 600 ppm
Bias Long-Term Repeatability 0.5 mg 0.8 mg 1.5 mg 2 mg 2 mg 4 mg

State-of-the-Art In-House Assembly Line

Physical Logic is constantly ramping up the facility for mass production. Using cutting-edge equipment, our highly trained production team, together with well-qualified subcontractors, are able to assure manufacturing efficiency and product reliability for all our customers. Our activities fully comply with AS9100D and ISO9001-2015.

Physical Logic Assembly Line

MEMS Accelerometers: Open Loop and Closed Loop Sensors for Inertial Sensing and Navigation
Physical Logic Ltd. Contact Directly Follow Company
Physical Logic Ltd. (R&D, Manufacturing and Sales) 48 Ben Zion Galis St. Petah Tikva, 4927948, Israel +972 3 570 8188 [email protected] Visit Website
Physical Logic Group (Munich Office) Max-Joseph-Strasse 7, 80333, Munich, Germany +49-89-544-79073 [email protected] Visit Website
Physical Logic AG (Corporate HQ) Lindenstrasse 26, CH-8008, Zurich, Switzerland +41 44 382 2037 [email protected] Visit Website