MEMS Accelerometers: Closed Loop and Open Loop Accelerometers for Inertial Sensing and Navigation

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Physical Logic is an expert developer and manufacturer of MEMS accelerometers for inertial sensing and navigation.

MAXL-CL-3030 Closed Loop MEMS Accelerometer

Their low C-SWaP (cost, size, weight and power) sensors are ideal for a wide range of various aerospace, land and maritime systems for defense and industrial applications, such as UAVs (unmanned aerial vehicles) UGVs (unmanned ground vehicles) and other robotic platforms.

Physical Logic’s MEMS accelerometers are manufactured at a state-of-the-art in-house production facility, featuring fully-qualified high-capacity assembly and test lines and supporting our strategic approach of continuous growth and strengthening of our technological capabilities. All Physical Logic manufacturing processes are fully AS9100D and ISO9001-2015 compliant.

MEMS Accelerometers:

MAXL-CL-3030 MEMS Closed Loop AccelerometerMAXL-OL-2040 MEMS Open Loop AccelerometerMAXL-OL-2002C MEMS Open Loop Accelerometer
Closed LoopOpen LoopExport Control-Free
MAXL-CL-3000 FamilyMAXL-OL-2000 FamilyMAXL-OL-2000C Family
Input Range±15 g and ±30 gFrom ±2 g up-to ±70 gFrom ±2 g up-to ±20 g

Physical Logic MEMS Sensor Technology

Physical Logic advanced accelerometers are based on micro-machined silicon MEMS devices, combined with a custom low-power ASIC. The MEMS device features a unique in-plane geometry that enables high reliability, excellent linearity, and extremely low thermo-mechanical noise levels.

The MEMS and ASIC chips are fabricated separately, and integrated into a highly-compact ceramic package, hermetically-sealed at atmospheric pressure. Featuring excellent long-term stability, our low-noise accelerometers offer clear performance advantages over other inertial and tactical grade MEMS units.

Physical Logic MEMS Accelerometer

Our Closed Loop accelerometers are produced using the same proven process flow as our Open Loop devices, with the addition of an actuator that is mechanically and electrically isolated from the sensing element. The advanced, custom-designed mixed-signal system on chip (SOC) ASIC provides advanced functions including analogue-to-digital conversion (ADC), sigma-delta modulation and phase compensation.

Learn more about our MEMS Sensor Technology >

Inertial Navigation for UAVs and Unmanned Systems

Our MEMS capacitive accelerometers are ideal for developing tactical and inertial navigation grade inertial measurement units (IMUs) for drones, autonomous vehicles, and robotics, providing high-accuracy acceleration and orientation data that can be used to calculate vehicle position and velocity.

Our sensors can be combined with gyroscopes and magnetometers to provide precise real-time inertial sensing capabilities for navigation, stability and control applications in a wide range of unmanned systems.

Integrated into a compact specially-designed ceramic package, our high precision MEMS accelerometers provide a competitive alternative to traditional electromechanical accelerometers and feature superior C-SWaP characteristics. Our product line includes the only inertial navigation grade Closed Loop MEMS accelerometer currently available on the market.

Closed Loop MEMS Accelerometers

MAXL-CL-3000 Inertial Navigation Grade Accelerometer Family

The MAXL-CL-3000 is a family of advanced high-performance MEMS Closed Loop accelerometers for tactical and inertial navigation applications, incorporating a unique MEMS device and custom ASIC and providing a digital acceleration output.

With a low C-SWaP footprint in a hermetically-sealed LCC44 package, and current consumption of less than 50 mA, these high-grade sensors enable high volume production with excellent reliability and reduced cost. They are ideal for incorporation into IMUs and inertial sensing systems that can compete with other market-leading devices.

MAXL-CL-3030 – High-Precision MEMS Accelerometer

MAXL-CL-3030 MEMS Closed Loop AccelerometerThe MAXL-CL-3030, the flagship product of the MAXL-CL-3000 family of MEMS Closed Loop accelerometers, is ideal for demanding tactical and inertial navigation applications. Incorporating a unique MEMS device and custom ASIC, the MAXL-CL-3030 provides a digital acceleration output and a ±30g sensing range.

Available in several tactical and inertial performance grades with superior performance and excellent measurement accuracy, the MAXL-CL-3030 range features one-year bias repeatability of down to less than 0.5 mg, one year scale factor repeatability of down to less than 400 ppm, and VRE of down to less than 25 µg/ g2 rms.

The MAXL-CL-3030 is available as an interface board for easy and convenient customer evaluation and prototype testing. Physical Logic also offers customers assembly and testing facilities for its accelerometers on user-designed boards.

Specifications:

MAXL-CL-3030-10MAXL-CL-3030-15MAXL-CL-3030-20MAXL-CL-3030-30
Input Range±30 g±30 g±30 g±30 g
Bandwidth>300 Hz>300 Hz>300 Hz>300 Hz
Noise Density<50 µg/√Hz<45 µg/√Hz<45 µg/√Hz<45 µg/√Hz
VRE (20-2000 Hz)<30 µg/g2 rms<25 µg/g2 rms<25 µg/g2 rms<25 µg/g2 rms
SF Long-Term Repeatability<800 ppm<600 ppm<400 ppm<400 ppm
Bias Long-Term Repeatability<4000 µg<2000 µg<1200 µg<500 µg

MAXL-CL-3015 – Low Noise Accelerometer

MAXL-CL-3015 MEMS Closed Loop AccelerometerThe MAXL-CL-3015 range of MEMS Closed Loop accelerometers is available in several performance grades, providing a digital acceleration output and a ±15g sensing range.

Ideal for tactical and inertial navigation applications, these high-grade sensors enable high volume production with excellent reliability and reduced cost.

Specifications:

MAXL-CL-3015-10MAXL-CL-3015-15MAXL-CL-3015-20MAXL-CL-3015-30
Input Range±15 g±15 g±15 g±15 g
Bandwidth>300 Hz>300 Hz>300 Hz>300 Hz
Noise Density<45 µg/√Hz<40 µg/√Hz<40 µg/√Hz<40 µg/√Hz
VRE (20-2000 Hz)<30 µg/g2 rms<25 µg/g2 rms<25 µg/g2 rms<25 µg/g2 rms
SF Long-Term Repeatability<800 ppm<600 ppm<400 ppm<400 ppm
Bias Long-Term Repeatability<4000 µg<2000 µg<1200 µg<500 µg