CMS300 MEMS Combi-Sensor
The CMS series of MEMS sensors combines a single axis gyro, dual-axis low-g accelerometer, and dedicated control ASIC to deliver angular rate and linear acceleration measurements with class-leading bias and noise over temperature. Enclosed in a hermetically-sealed ceramic LCC surface mount package, the sensors are available in two versions, one that can be mounted flat to a board and an orthogonal version that can be mounted on its side.
The sensors feature user-selectable dynamic range and bandwidth. Sensor measurements, built-in test status and device temperature are all output via a digital SPI interface. Each individual unit is calibrated over the full rated temperature range.
| CMS300 | CMS390 | |
| Dimensions | 10.4 x 6.0 x 2.2 mm | 10.4 x 6.7 x 2.7mm |
| Digital Dynamic Range | ±150°/s to ±300°/s | ±150°/s to ±300°/s |
| Bias Instability | 10°/hr | 10°/hr |
| Bias over Temperature | ±30mg (2.5g) – ±50mg (10g) | ±30mg (2.5g) – ±50mg (10g) |
| Supply Voltage | 3.3V | 3.3V |
| Current Consumption | 8 mA | 8 mA |
